Page 10 - Univac Catalog_E_Book
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IBAD                                                                             UNIVAC



         SYSTEM SERIES                                                                   900

         高真空多层膜镀膜机                                                                                                                                                                           System Model                   UNIVAC-900
                                                                                                                                                                                             Process Chamber                  Ø900×H1080

                                                                                                                                                                                                                               22”×1set
                                                                                                                                                                                    Pumping            Mechanical booster Pump
                                                                                                                                                                                     System              Oil Rotary Pump

                                                                                                                                                                                                          Meissner Trap        Polycold
                                                                                                                                                                                 Substrate Carrier       Calotte Diameter      850mm
                                                                                                                                                                                 Substrate Heating       Halogen Heater       Up to 250℃

                                                                                                                                                                                                       Electron Beam Source     10kw
                                                                                                                                                                                Evaporation Source
                                                                                                                                                                                                         Thermal Source         5kw
                                                                                                                                                                                Substrate Treatment        Ion Source           4kw

                                                                                                                                                                                Thin Film Thickness  Quartz Crystal Thickness Monitoring  QCM
                                                                                                                                                                                   Monitoring            Optical Thickness
                                                                                                                                                                                                       Monitoring (optional)    OMS
                                                                                                                                                                                                            Power             3ph 380/220V

                                                                                                                                                                                                           Frequency          AC 50/60Hz
                                                                                                                                                                                                            Power             80kw(Max)
                                                                                                                                                                                      Utility
                                                                                                                                                                                                         Water Pressure       2 ~ 4kgf/ ㎠

                                                                                                                                                                                                          Air Pressure        5 ~ 6kgf/ ㎠
                                                                                                                                                                                                        Floor Load Weight    3,000kg(approx)










                                                                                                                                   A  Processing Chamber

                                                                                                                                   B  System Controller                                                F                 C  D

                                                                                                                                   C  Electron beam power supply

                                                                                                                                  D   Ion beam power supply                                     G
                                                                                                                                                                                                               E
                                                                                                                                   E  High vacuum pump                                                                     B
                                                                                                                                      (Oil diffusion / Cryo/ Turbo pump)

                                                                                                                                   F  Low vacuum pump                                                          A
                                                                                                                                      (Rotary pump+Booster)

                                                                                                                                  G   Water vapor cryocooler












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